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Gas phase mass flow controller

The mass flow controller (MFC) is used to precisely measure and control the mass flow of a gas, and is widely used in analytical measuring instruments. The quality of its performance index directly affects the precision and accuracy of gas flow control, and then affects the accuracy and reliability of the overall analysis results.


  • performance
  • technical index
  • Product note

    Corrosion resistant material to avoid corrosion by corrosive gas



    Super fast response, responding speed less than 100ms



    Built-in temperature compensation mechanism, more accurate flow control



    Fully sealed gas circuit system to avoid leakage of dangerous gas



    Multiple transmission ports to meet different needs 


    Model

    Full-scale flow standard

    Flow control range

    Flow measurement range

    MFC-300

    MFC-600

    3 SLPM

    6 SLPM

    5%~100% F.S.

    0%~100% F.S.

    Accuracy

    Repeatability

    Response   time

    ±1%F.S.

    ±0.5%F.S.

    <100ms

    Working   pressure

    Leak   rate

    Sealing material

    0.05Mpa~0.2Mpa

    1×10-9 atm•cc/sec He

    Viton, Teflon

    Rated operating voltage / current

    Maximum power consumption

    15VDC/500mA

    <5W

    Transmission interface

    RS232  DB9 pin (Male)

    input / output

    0-5.00V DC


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